Documents

p Mod Manual

Description
manual for pmod
Categories
Published
of 55
All materials on our website are shared by users. If you have any questions about copyright issues, please report us to resolve them. We are always happy to assist you.
Related Documents
Share
Transcript
  OPERATIONS ANDMAINTENANCE MANUALPLASMODPlasma System NOTE: 6th major revision MARCH INSTRUMENTS, INC.4057 PORT CHICAGO HIGHWAYCONCORD, CA 94520PHONE: 925 827 1240FAX: 925 827 1189  2  3 TABLE OF CONTENTS INTRODUCTION...............................................................................................4Equipment Options.................................................................................5SAFETY............................................................................................................6Safety Features......................................................................................6Warnings and Precautions.....................................................................7UNPACKING.....................................................................................................8Long Term Storage.................................................................................8INSTALLATION.................................................................................................9Facilities Requirements..........................................................................9System Assembly...................................................................................10EQUIPMENT ORIENTATION............................................................................13General Equipment Description..............................................................13Controls and Indicators...........................................................................16THEORY OF OPERATION...............................................................................19The Plasma Process: An Overview........................................................19OPERATION.....................................................................................................22SERVICE AND MAINTENANCE.......................................................................25Warranty.................................................................................................25Servicing.................................................................................................26User Maintenance...................................................................................27System Troubleshooting.........................................................................29Tuning and Replacement Procedures....................................................32 APPENDIX........................................................................................................38Process Development- Etching...............................................................38 Avoiding Gas Line Contamination..........................................................40Consumables..........................................................................................41GLOSSARY.......................................................................................................42NOTES..............................................................................................................46SCHEMATICS...................................................................................................48MATERIAL SAFETY DATA SHEET  4 INTRODUCTION This manual is broken down into sections dealing with all issues related to thePlasmod Plasma Treatment System.This includes detailed installation instructions, specifications, and a full descriptionof the equipment and all controls and indicators on the equipment components. A safety hazards and precautions section points out any risks involved withequipment operation along with recommendations for safely operating andmaintaining the system. The safety features included with the system are alsooutlined. A section on theory of operation explains the principals behind plasma generationand the variables that are under operator control during process development andoptimization. The goal is to give the beginning plasma process engineer a startingpoint for developing plasma treatments for various applications using the Plasmodequipment. The user should contact March Instruments if more detailed processdevelopment assistance is required for a specific application. Another section gives the step by step details for operation of the equipment.The service information section contains the information on warranties, troubleshooting, equipment repair, and parts replacement.The appendix lists a detailed explanation of the effect of changing the variables inthe plasma process and a characterization of some aspects of the system. A glossary defines the terms used in the manual.Textural conventions used in the manual are as follows:In the Installation Instructions section, parts that the installer needs to attach to themain unit are listed in all capital letters. In operating procedures, call-outs for buttonsthe operator is instructed to actuate are listed in all capital letters. Section headingsare in bold print and underlined.Nomenclature for data entry in this manual and on the system itself uses Torr inreference to pressure, watts (w) for power, and seconds (secs) or minutes (mins) for time.This is the sixth revision of the Plasmod manual. This manual can be ordered under March Instruments part number 021-1001.
We Need Your Support
Thank you for visiting our website and your interest in our free products and services. We are nonprofit website to share and download documents. To the running of this website, we need your help to support us.

Thanks to everyone for your continued support.

No, Thanks