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  Microelectromechanical Systems (MEMS) An introduction Jr-Lung (Eddie) Lin  Department of Mechanical and Automation Engineering,  I-Shuo University  Email: ljl@isu.edu.tw   Outline ã Introduction ã Applications  –   Passive structures  –  Sensors  –   Actuators ã Future Applications   ã MEMS micromachining technology  –   Bulk micromachining  –  Surface micromachining  –   LIGA  –  Wafer bonding ã Thin film MEMS  –   Motivation  –   Microresonators ã MEMS resources ã Conclusions  What are MEMS? (Micro-electromechanical Systems) ã Fabricated using micromachining technology ã Used for sensing, actuation or are  passive  micro-structures ã Usually integrated with electronic circuitry for control and/or information processing  3-D Micromachined Structures Linear Rack Gear Reduction Drive   Triple-Piston Microsteam Engine    Photos from Sandia National Lab. Website: http://mems.sandia.gov

V3-ENGLISH-2013-4

Jul 23, 2017
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