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Design Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI

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i Design, Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI By Paul James gana Student umber: 1385550 i ii Design, Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI THESIS Submitted in partial fulfillment of the requirements for the degree of MASTER OF SCIENCE in ELECTRICAL ENGINEERING By Paul James Ngana Thesis Committee Chairperson: Prof. Paddy J. French, Ele
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  i Design, Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI By Paul James gana   Student umber: 1385550  i  ii Design, Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI THESIS Submitted in partial fulfillment of the requirements for the degree of MASTER OF SCIENCE in ELECTRICAL ENGINEERING By Paul James Ngana Thesis Committee Chairperson: Prof. Paddy J. French, Electronic Instrumentation, TU Delft Supervisor : dr.ir. Jan-Jaap Koning, NXP Semiconductors Member : Assist. Prof. dr. ir. Hans Goosen, TU Delft Member : Prof. dr. ir. Gerard Meijer, TU Delft  iii

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