A Fully Integrated CMOS Interface ASIC for Two-Axis Piezoelectric Angular Rate MEMS Inertial Sensors

A Fully Integrated CMOS Interface ASIC for Two-Axis Piezoelectric Angular Rate MEMS Inertial Sensors
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  A Fully Integrated CMOS Interface ASIC for Two-Axis Piezoelectric Angular Rate MEMS Inertial Sensors Sultan A. Alqarni  + , Abdulfattah M. Obeid, Mohammed S. BenSaleh, Syed Manzoor Qasim   National Center for Electronics and Photonics Technology, King Abdulaziz City for Science and Technology, Riyadh, Saudi Arabia, + Email: Summary Microelectromechanical system (MEMS) technology has revolutionized the inertial sensors market. It enabled the development of compact, low cost, low noise and low power inertial sensors which are used in consumer, industrial and automotive applications. One of the challenges faced is in the design of interface electronics for these sensors. In this paper, we present the architecture and measurement results of a low power, low noise application specific integrated circuit (ASIC) that interfaces to two-axis consumer-grade piezoelectric angular rate MEMS inertial sensors. The proposed ASIC has been fully integrated in 0.18 µm standard HVCMOS 6-metal layer technology and achieves better performance as compared to other related work. The presented ASIC design achieves a noise floor of 5.3 m o /s/√Hz over 100 Hz bandwidth. It occupies a compact area of 4mm 2  and draws 6.5mA from a single 3V supply. It meets the area, power and low-cost requirements which make it suitable for use in consumer applications such as image stabilization used in mobile phones and digital cameras. Motivation Due to the rapid advancement in MEMS technology much attention has been paid to the development of compact and low-cost inertial sensors. Inertial sensors are used in high-end applications such as navigation and automotive. However, the main drivers for low-cost and low-power inertial sensors come from consumer applications such as optical image stabilization used in smartphones and digital video and still cameras. During the past years, research and development of these sensors experienced a surge due to the huge demand from the consumer market and strong interest in realizing high performance low-cost devices using MEMS technology. Inertial sensors are mainly used for linear motion sensing (accelerometer) or angular rate sensing (gyroscope) 1 . Angular rate inertial sensors measure the rotation rate of a body with respect to an inertial frame of reference. These angular inertial sensors are used in many applications such as motion sensing, monitoring and stabilization of motion, gesture recognition and personal navigation. ASIC is usually required to interface with these sensors. A number of solutions for the interface electronics and ASIC design for angular rate sensors have been presented in literature 2,3,4 .Generally, an angular inertial sensor interface system is composed of drive and sense subsystems respectively. Drive subsystem, also known as the drive loop, is used for two main functions; maintain the oscillation of the inertial sensor resonator at its resonance frequency at suitable constant amplitude and to reduce resonator’s start -up time. It is also used to generate the required system clocks. Sense subsystem or the sense path detects angular velocity through the sensors’ sense terminals. The angular velocity, due to Coriolis effect, is modulated on a carrier of the same drive loop frequency. Sense path demodulates, amplifies the sense signal and performs anti-alias filtering before analog-to-digital conversion (ADC). 1  X. Jiang, J. I. Seeger, M. Kraft and B. E. Boser, “A monolithic surface micromachined Z-Axis gyroscope with digital o utput,”  Dig. Symp. VLSI Circuits , pp. 16-19, June 2000. 2  L. Aaltonen, T. Speeti, M. Saukoski and K. Halonen “An Interface for a 300˚/s capacitive 2-Axis micro-gyroscope with pseudo-CT r eadout,”  ISSCC Dig. Tech. Papers , pp. 344-345, Feb. 2009. 3  L. Aaltonen, A. Kalanti, M. Pulkkinen, M. Paavola, M. Kämäräinen and K. A. I. Halonen , “ A 2.2mA 4.3 mm 2  ASIC for a 1000 o  /s 2-Axis capacitive micro-gyroscope ,”    IEEE J. Solid-State Circuits , vol. 46, pp. 1682-1692. 2011. 4  L. Aaltonen and K. A. I. Halonen, “ An analog driving loop for a capacitive MEMS gyroscope ”,    Analog Integr. Cir. Signal Process ing, vol. 63, pp. 465-476, 2010.
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